Titanium Nitride Film on Sapphire Substrate with Low Dielectric Loss for Superconducting Qubits
Hao Deng,
Zhijun Song,
Ran Gao,
Tian Xia,
Feng Bao,
Xun Jiang,
Hsiang-Sheng Ku,
Zhisheng Li,
Xizheng Ma,
Jin Qin,
Hantao Sun,
Chengchun Tang,
Tenghui Wang,
Feng Wu,
Wenlong Yu,
Gengyan Zhang,
Xiaohang Zhang,
Jingwei Zhou,
Xing Zhu,
Yaoyun Shi,
Huihai Zhao,
Chunqing Deng
一月 2022
